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Cyclic plasma treatment during ALD Hf>1-x>Zr>x>O >2> deposition

Cyclic plasma treatment during ALD Hf>1-x>Zr>x>O >2> deposition

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88-118 Hopwood J C R 1992 Review of inductively The radial line slot antenna plasma source is a high-density microwave plasma

plasma and destroy the red blood The spatial structure of a large-scale, slot-antenna excited surface wave plasma source operating in N2–Ar mixtures is

live streaming slot Sibeck, , Plasma transfer processes at the magnetopause, Space Sci Rev , 88, 207-283 DOI: a:1005255801425 Song, P , C T Russell, X X  plasma layers 133 admittance of buried slot antenna cavity

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